Inventor · Tokyo, JP

Yuichiro Kotake

5Patents
4h-index
8Co-inventors
36Inventor score

Filing activity: Dec 22, 2000 → Nov 20, 2001

Most-cited inventions

PatentTitleAreaCited byStatus
US6479409B2 Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agent Electricity 61 Expired
US6642157B2 Film forming method and semiconductor device Electricity 18 Expired
US6645883B2 Film forming method, semiconductor device and manufacturing method of the same Electricity 12 Expired
US6852651B2 Semiconductor device and method of manufacturing the same Electricity 11 Expired
US6911405B2 Semiconductor device and method of manufacturing the same Electricity 3 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.