Yukako MURAKAMI
4Patents
1h-index
25Co-inventors
40Inventor score
Filing activity: Aug 29, 2014 → Oct 30, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10147619B2 | Substrate treatment apparatus, substrate treatment method, and etchant | Electricity | 1 | Active |
| US11118110B2 | Stripping liquid, stripping method, and electronic-component fabricating method | Electricity | 0 | Active |
| US10957553B2 | Etching solution, etching method, and method for manufacturing an electronic component | Electricity | 0 | Active |
| US9412825B2 | Semiconductor device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.