Yuya Nonaka
4Patents
2h-index
8Co-inventors
30Inventor score
Filing activity: May 23, 2013 → Dec 2, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9899291B2 | Method for protecting layer by forming hydrocarbon-based extremely thin film | Electricity | 447 | Active |
| US9365924B2 | Method for forming film by plasma-assisted deposition using two-frequency combined pulsed RF power | Electricity | 447 | Active |
| US10526704B2 | Film forming apparatus | Chemistry; Metallurgy | 0 | Active |
| US11761084B2 | Substrate processing apparatus and method of processing substrate | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.