Zion Koren
6Patents
6h-index
14Co-inventors
52Inventor score
Filing activity: Jan 6, 2000 → Sep 11, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6559424B2 | Windows used in thermal processing chambers | Chemistry; Metallurgy | 52 | Expired |
| US6717158B1 | Heating device for heating semiconductor wafers in thermal processing chambers | Mechanical Engineering; Lighting; Heating | 36 | Expired |
| US6970644B2 | Heating configuration for use in thermal processing chambers | Chemistry; Metallurgy | 34 | Expired |
| US6770146B2 | Method and system for rotating a semiconductor wafer in processing chambers | Electricity | 29 | Expired |
| US7269343B2 | Heating configuration for use in thermal processing chambers | Chemistry; Metallurgy | 19 | Expired |
| US7949237B2 | Heating configuration for use in thermal processing chambers | Chemistry; Metallurgy | 11 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.