Patent · US Active

Pass-through interconnect structure for microelectronic dies and associated systems and methods

US10020287B2 · kind B2 · utility

0Cited by
57References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 4, 2015
Grant dateJul 10, 2018
Priority date
Expiry dateJan 18, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/01019
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Pass-through interconnect structures for microelectronic dies and associated systems and methods are disclosed herein. In one embodiment, a microelectronic die assembly includes a support substrate, a first microelectronic die positioned at least partially over the support substrate, and a second microelectronic die positioned at least partially over the first die. The first die includes a semiconductor substrate, a conductive trace extending over a portion of the semiconductor substrate, a substrate pad between the trace and the portion of the semiconductor substrate, and a through-silicon via (TSV) extending through the trace, the substrate pad, and the portion of the semiconductor substrate. The second die is electrically coupled to the support substrate via a conductive path that includes the TSV.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.