Micromechanical structure comprising carbon material and method for fabricating the same

US10106398B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Ulrich Schmid · Wien, AT
• Tobias Frischmuth · Wien, AT
• Peter Irsigler · Ried im Innkreis, AT
• Thomas Grille · Villach, AT
• Daniel Maurer · Feld am See, AT
• Ursula Hedenig · Villach, AT
• Markus Kahn · Rangersdorf, AT
• Guenter Denifl · Annenheim, AT
• Michael Schneider · Wien, AT

Key dates

• Filing date: May 28, 2015
• Grant date: Oct 23, 2018
• Expiry date: May 28, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H04R2201/003
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micromechanical structure comprises a substrate and a functional structure arranged at the substrate. The functional structure comprises a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region. The functional structure comprises a carbon layer arrangement, wherein a basis material of the carbon layer arrangement is a carbon material.