Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation

US10146135B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Michael Layh · Altusried, DE
• Markus Deguenther · Aalen, DE
• Michael Patra · Oberkochen, DE
• Johannes Wangler · Oberkochen, DE
• Manfred Maul · Aalen, DE
• Damian Fiolka · Oberkochen, DE
• Gundula Weiss · Aalen, DE

Key dates

• Filing date: Feb 27, 2015
• Grant date: Dec 4, 2018
• Expiry date: Apr 26, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/105
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A microlithography projection exposure apparatus includes illumination optics configured to illuminate object field points of an object field in an object plane, and projection optics configured to image the object field onto an image field in an image plane. The illumination optics includes a multi-mirror array which includes a plurality of mirrors configured to adjust an intensity distribution in exit pupils associated with the object field points. The illumination optics also includes an optical system configured to produce, via an incoherent superposition of illumination rays, a temporal modification of a temporal stabilization of an illumination of the multi-mirror array. The optical system includes a mirror which includes a mirror surface. In addition, the optical system includes an actuator configured to produce a tilt of at least a portion of the mirror surface.