Load lock door assembly, load lock apparatus, electronic device processing systems, and methods

US10278501B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Eran Weiss · Ramat Gan, IL
• Travis Morey · Austin, US
• Nir Merry · Mountain View, US
• Paul B. Reuter · Austin, US
• Izya Kremerman · Los Gatos, US
• Jeffrey C. Hudgens · San Francisco, US
• Dean C. Hruzek · Cedar Park, US

Key dates

• Filing date: Apr 17, 2015
• Grant date: May 7, 2019
• Expiry date: Mar 11, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67201
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A load lock door assembly with side actuation is disclosed. Load lock door assembly includes a load lock door and a door support assembly coupled thereto. Door support assembly includes one or more pivot members pivotable relative to one or more sides of the load lock body, a door support bracket coupled to the load lock door, one or more separator side actuators coupled between the door support bracket being actuatable to separate the load lock door from a sealing surface, and one or more pivot side actuator operable to pivot the load lock door above or below the load lock entry. Load lock apparatus with side actuation, systems including one or more load lock door assemblies with side actuation, and methods of operating load lock door assemblies are provided, as are numerous other aspects.