Solid vaporizer
US10392700B2 · kind B2 · utility
10Cited by
10References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 28, 2015 |
| Grant date | Aug 27, 2019 |
| Priority date | — |
| Expiry date | Feb 26, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/18
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Vaporizers are described, suited for vaporizing a vaporizable solid source materials to form vapor for subsequent use, e.g., a deposition of metal from organometallic source material vapor on a substrate for manufacture of integrated circuitry, LEDs, photovoltaic panels, and the like. Methods are described of fabricating such vaporizers, including methods of reconfiguring up-flow vaporizers for down-flow operation to accommodate higher flow rate solid delivery of source material vapor in applications requiring same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.