Semiconductor device including compound semiconductor materials and an impurity and point defect blocking superlattice
US10468245B2 · kind B2 · utility
41Cited by
66References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2018 |
| Grant date | Nov 5, 2019 |
| Priority date | — |
| Expiry date | Mar 9, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/85
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor device may include a substrate including a first Group IV semiconductor having a recess therein, an active layer comprising a Group III-V semiconductor within the recess, and a buffer layer between the substrate and active layer and comprising a second Group IV semiconductor. The semiconductor device may further include an impurity and point defect blocking superlattice layer adjacent the buffer layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.