Copper microcooler structure and fabrication
US10490481B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 17, 2018 |
| Grant date | Nov 26, 2019 |
| Priority date | — |
| Expiry date | Sep 17, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L24/09
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Techniques that facilitate a copper microcooler structure are provided. In one example, a device includes a first copper microcooler structure and a second copper microcooler structure. The first copper microcooler structure includes a first copper plate and a first set of copper channels attached to the first copper plate. The second copper microcooler structure includes a second copper plate and a second set of copper channels attached to the second copper plate. A surface of the second copper plate associated with the second copper microcooler structure is bonded to one or more surfaces of the first set of copper channels associated with the first copper microcooler structure via a fusion bond.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.