Cooling base with spiral channels for ESC
US10586718B2 · kind B2 · utility
0Cited by
10References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2016 |
| Grant date | Mar 10, 2020 |
| Priority date | — |
| Expiry date | Jan 11, 2038 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF28F2210/02
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
Implementations described herein provide a cooling base and a substrate support assembly having the same. In one example, a cooling base is provided that includes a body coupled to a cap. A plurality cooling channels are disposed in the body and bounded on at least one side by the cap. The plurality cooling channels have a polar array of spirals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.