Vladimir Knyazik
23Patents
5h-index
31Co-inventors
65Inventor score
Filing activity: Mar 15, 2013 → Jan 22, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10163606B2 | Plasma reactor with highly symmetrical four-fold gas injection | Electricity | 10 | Active |
| US9610591B2 | Showerhead having a detachable gas distribution plate | Electricity | 8 | Active |
| US9911579B2 | Showerhead having a detachable high resistivity gas distribution plate | Electricity | 6 | Active |
| US10008368B2 | Multi-zone gas injection assembly with azimuthal and radial distribution control | Electricity | 5 | Active |
| US11189502B2 | Showerhead with interlaced gas feed and removal and methods of use | Electricity | 5 | Active |
| US9536710B2 | Tunable gas delivery assembly with internal diffuser and angular injection | Electricity | 4 | Active |
| US10607816B2 | Showerhead having a detachable high resistivity gas distribution plate | Electricity | 3 | Active |
| US10332772B2 | Multi-zone heated ESC with independent edge zones | Emerging Cross-Sectional Technologies | 3 | Active |
| US10625277B2 | Showerhead having a detachable gas distribution plate | Electricity | 2 | Active |
| US11728141B2 | Gas hub for plasma reactor | Electricity | 1 | Active |
| US11244811B2 | Plasma reactor with highly symmetrical four-fold gas injection | Electricity | 1 | Active |
| US11139150B2 | Nozzle for multi-zone gas injection assembly | Electricity | 1 | Active |
| US9472378B2 | Multiple zone coil antenna with plural radial lobes | Electricity | 1 | Active |
| US10790120B2 | Showerhead having a detachable high resistivity gas distribution plate | Electricity | 1 | Active |
| US9312104B2 | Coil antenna with plural radial lobes | Electricity | 0 | Active |
| US10553398B2 | Power deposition control in inductively coupled plasma (ICP) reactors | Electricity | 0 | Active |
| US9945033B2 | High efficiency inductively coupled plasma source with customized RF shield for plasma profile control | Electricity | 0 | Active |
| US11130142B2 | Showerhead having a detachable gas distribution plate | Electricity | 0 | Active |
| US10410841B2 | Side gas injection kit for multi-zone gas injection assembly | Electricity | 0 | Active |
| US12191118B2 | Monolithic modular microwave source with integrated process gas distribution | Electricity | 0 | Active |
| US11881384B2 | Monolithic modular microwave source with integrated process gas distribution | Electricity | 0 | Active |
| US10586718B2 | Cooling base with spiral channels for ESC | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US12033881B2 | Reduced localized force in electrostatic chucking | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.