Inventor · San Jose, CA, US

Stephen Prouty

22Patents
3h-index
26Co-inventors
59Inventor score

Filing activity: Mar 11, 2013 → Apr 24, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9146223B1 Automated soil measurement device Physics 14 Active
US9863925B2 Automated soil measurement device Physics 13 Active
US9291545B1 Self-filling soil processing chamber with dynamic extractant volume Physics 6 Active
US10168260B2 Self-filling soil processing chamber with dynamic extractant volume Physics 3 Active
US9739693B2 Self-filling soil processing chamber with dynamic extractant volume Physics 3 Active
US11380572B2 Substrate support carrier with improved bond layer protection Electricity 2 Active
US11373893B2 Cryogenic electrostatic chuck Electricity 1 Active
US11666952B2 Condition selectable backside gas Performing Operations; Transporting 1 Active
US11075105B2 In-situ apparatus for semiconductor process module Electricity 1 Active
US11646183B2 Substrate support assembly with arc resistant coolant conduit Electricity 1 Active
US10410900B2 Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic Electricity 0 Active
US11651987B2 Substrate support carrier with improved bond layer protection Electricity 0 Active
US11764041B2 Adjustable thermal break in a substrate support Electricity 0 Active
US11569114B2 Semiconductor processing with cooled electrostatic chuck Performing Operations; Transporting 0 Active
US12334315B2 Cooled substrate support assembly for radio frequency environments Electricity 0 Active
US11437261B2 Cryogenic electrostatic chuck Electricity 0 Active
US12033881B2 Reduced localized force in electrostatic chucking Electricity 0 Active
US11887879B2 In-situ apparatus for semiconductor process module Electricity 0 Active
US10586718B2 Cooling base with spiral channels for ESC Mechanical Engineering; Lighting; Heating 0 Active
US11456161B2 Substrate support pedestal Electricity 0 Active
US12397330B2 Condition selectable backside gas Performing Operations; Transporting 0 Active
US10641756B2 Automated soil measurement Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.