Gas feedthrough assembly

US10640870B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Daping Yao · San Jose, US
• Hyman Lam · San Jose, US
• Jiang Lu · Zhanjiang, CN
• Dien-Yeh Wu · San Jose, US
• Can Xu · San Jose, US
• Paul F. Ma · Santa Clara, US
• Mei Chang · Saratoga, US

Key dates

• Filing date: Mar 21, 2017
• Grant date: May 5, 2020
• Expiry date: Mar 14, 2038

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/45512
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A gas feedthrough assembly and processing apparatus using the same are disclosed herein. In some embodiments, the gas feedthrough assembly, includes a dielectric body; at least one channel extending through the dielectric body; and a dielectric tube disposed within the at least one channel, wherein an inner diameter of the at least one channel is greater than an outer diameter of the dielectric tube such that a gap is formed between an outer wall of the dielectric tube and an inner wall of the at least one channel.