Coloring aware optimization
US10670973B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 29, 2016 |
| Grant date | Jun 2, 2020 |
| Priority date | — |
| Expiry date | Oct 5, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F30/00
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method includes obtaining a sub-layout having an area that is a performance limiting spot, adjusting colors of patterns in the area, and determining whether the area is still a performance limiting spot. Another method includes decomposing patterns in a design layout into multiple sub-layouts; determining for at least one area in one of the sub-layouts, the likelihood of that a figure of merit is beyond its allowed range; and if the likelihood is above a threshold, that one sub-layout has a performance limiting spot. Another method includes: obtaining a design layout having a first group of patterns and a second group of patterns, wherein colors of the first group of patterns are not allowed to change and colors of the second group of patterns are allowed to change; and co-optimizing at least the first group of patterns, the second group of patterns and an illumination of a lithographic apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.