Patent · US Active

Electrostatic chuck with variable pixelated magnetic field

US10790180B2 · kind B2 · utility

3Cited by

15References

9Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Chih-Hsun Hsu · Daxi District, TW
Tza-Jing Gung · San Jose, US
Benjamin Schwarz · Strohberg, DE
Shahid Rauf · Pleasanton, US
Ankur Agarwal · Mountain View, US
Vijay D. Parkhe · San Jose, US
Michael D. Willwerth · Campbell, US
Zhiqiang Guo · Shandong, CN

Key dates

Filing date	Sep 19, 2019
Grant date	Sep 29, 2020
Priority date	—
Expiry date	Sep 19, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/32715
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Electrostatic chucks with variable pixelated magnetic field are described. For example, an electrostatic chuck (ESC) includes a ceramic plate having a front surface and a back surface, the front surface for supporting a wafer or substrate. A base is coupled to the back surface of the ceramic plate. A plurality of electromagnets is disposed in the base, the plurality of electromagnets configured to provide pixelated magnetic field tuning capability for the ESC.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.