Inventor · Mountain View, CA, US

Ankur Agarwal

18Patents
4h-index
42Co-inventors
56Inventor score

Filing activity: Oct 3, 2005 → Sep 19, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US8404598B2 Synchronized radio frequency pulsing for plasma etching Electricity 69 Active
US8382999B2 Pulsed plasma high aspect ratio dielectric process Electricity 51 Active
US8962488B2 Synchronized radio frequency pulsing for plasma etching Electricity 23 Active
US8974684B2 Synchronous embedded radio frequency pulsing for plasma etching Electricity 12 Active
US8980760B2 Methods and apparatus for controlling plasma in a process chamber Electricity 4 Active
US10790180B2 Electrostatic chuck with variable pixelated magnetic field Electricity 3 Active
US9896769B2 Inductively coupled plasma source with multiple dielectric windows and window-supporting structure Electricity 3 Active
US9745663B2 Symmetrical inductively coupled plasma source with symmetrical flow chamber Electricity 3 Active
US10131994B2 Inductively coupled plasma source with top coil over a ceiling and an independent side coil and independent air flow Electricity 2 Active
US7704878B2 Contact spacer formation using atomic layer deposition Electricity 2 Active
US10460968B2 Electrostatic chuck with variable pixelated magnetic field Electricity 1 Active
US9362131B2 Fast atomic layer etch process using an electron beam Electricity 1 Active
US10573493B2 Inductively coupled plasma apparatus Electricity 1 Active
US9520294B2 Atomic layer etch process using an electron beam Electricity 1 Active
US9978606B2 Methods for atomic level resolution and plasma processing control Electricity 0 Active
US9449796B2 Plasma processing system including a symmetrical remote plasma source for minimal ion energy Electricity 0 Active
US10395896B2 Method and apparatus for ion energy distribution manipulation for plasma processing chambers that allows ion energy boosting through amplitude modulation Electricity 0 Active
US8562742B2 Apparatus for radial delivery of gas to a chamber and methods of use thereof Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.