Plasma erosion resistant thin film coating for high temperature application
US10815562B2 · kind B2 · utility
3Cited by
30References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2018 |
| Grant date | Oct 27, 2020 |
| Priority date | — |
| Expiry date | Nov 10, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An article such as a susceptor includes a body of a thermally conductive material coated by a first protective layer and a second protective layer over a surface of the body. The first protective layer is a thermally conductive ceramic. The second protective layer covers the first protective layer and is a plasma resistant ceramic thin film that is resistant to cracking at temperatures of 650 degrees Celsius.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.