Gas injector with baffle

US11077410B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Vishwas Kumar Pandey · Savanuru, IN
• Lara Hawrylchak · Gilroy, US
• Eric Kihara Shono · San Mateo, US
• Kartik Shah · Saratoga, US
• Christopher S. Olsen · Fremont, US
• Sairaju Tallavarjula · Santa Clara, US
• Kailash Pradhan · Campbell, US
• Rene George · San Jose, US
• Johanes F. Swenberg · Los Gatos, US
• Stephen Moffatt · Leatherhead, GB

Key dates

• Filing date: Aug 29, 2018
• Grant date: Aug 3, 2021
• Expiry date: Jan 5, 2039

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B01J2208/00929
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

Gas injectors for providing uniform flow of fluid are provided herein. The gas injector includes a plenum body. The plenum body includes a recess, a protrusion adjacent to the recess and extending laterally away from the plenum body, and a plurality of nozzles extending laterally from an exterior surface of the plenum body. The plenum body has a plurality of holes in an exterior wall of the plenum body. Each nozzle is in fluid communication with an interior volume of the plenum body. By directing the flow of fluid, the gas injector provides for a uniform deposition.