Inventor · Fremont, CA, US

Christopher S. Olsen

89Patents
10h-index
106Co-inventors
81Inventor score

Filing activity: May 12, 1999 → May 2, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US6653200B2 Trench fill process for reducing stress in shallow trench isolation Electricity 37 Expired
US6313466A Method for determining nitrogen concentration in a film of nitrided oxide material Electricity 29 Expired
US7910497B2 Method of forming dielectric layers on a substrate and apparatus therefor Electricity 24 Active
US6150234A Trench-diffusion corner rounding in a shallow-trench (STI) process Electricity 21 Expired
US7429540B2 Silicon oxynitride gate dielectric formation using multiple annealing steps Electricity 21 Expired
US8323754B2 Stabilization of high-k dielectric materials Electricity 19 Active
US7078302B2 Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal Electricity 17 Expired
US7972441B2 Thermal oxidation of silicon using ozone Electricity 15 Expired
US7122454B2 Method for improving nitrogen profile in plasma nitrided gate dielectric layers Emerging Cross-Sectional Technologies 12 Expired
US10861693B2 Cleaning method Electricity 11 Active
US7429538B2 Manufacturing method for two-step post nitridation annealing of plasma nitrided gate dielectric Electricity 8 Expired
US7902018B2 Fluorine plasma treatment of high-k gate stack for defect passivation Electricity 8 Active
US9054048B2 NH3 containing plasma nitridation of a layer on a substrate Electricity 7 Active
US8492292B2 Methods of forming oxide layers on substrates Electricity 7 Active
US7727828B2 Method for fabricating a gate dielectric of a field effect transistor Electricity 7 Active
US7645710B2 Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system Electricity 7 Active
US7972933B2 Method of selective nitridation Emerging Cross-Sectional Technologies 6 Active
US9683308B2 Method and apparatus for precleaning a substrate surface prior to epitaxial growth Chemistry; Metallurgy 6 Active
US8409353B2 Water cooled gas injector Electricity 6 Active
US7888217B2 Method for fabricating a gate dielectric of a field effect transistor Emerging Cross-Sectional Technologies 5 Active
US8043981B2 Dual frequency low temperature oxidation of a semiconductor device Electricity 4 Active
US9123758B2 Gas injection apparatus and substrate process chamber incorporating same Emerging Cross-Sectional Technologies 4 Active
US8808564B2 Method and apparatus for selective nitridation process Electricity 4 Active
US8168462B2 Passivation process for solar cell fabrication Emerging Cross-Sectional Technologies 4 Active
US9870921B2 Cleaning method Electricity 4 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.