Patent · US Active

In-situ optical chamber surface and process sensor

US11114286B2 · kind B2 · utility

9Cited by

7References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Chuang-Chia Lin · Diamond Bar, US
Upendra Ummethala · Cupertino, US
Steven E. Babayan · Los Altos, US
Lei Lian · Fremont, US

Key dates

Filing date	Apr 8, 2019
Grant date	Sep 7, 2021
Priority date	—
Expiry date	Apr 8, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/24585
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.