Patent · US Active

Power distribution network for 3D logic and memory

US11114381B2 · kind B2 · utility

5Cited by
11References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 4, 2019
Grant dateSep 7, 2021
Priority date
Expiry dateJan 8, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D89/105
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device is provided. The semiconductor device includes a transistor stack having a plurality of transistor pairs that are stacked over a substrate. Each transistor pair of the plurality of transistor pairs includes a n-type transistor and a p-type transistor that are stacked over one another. The plurality of transistor pairs have a plurality of gate electrodes that are stacked over the substrate and electrically coupled to gate structures of the plurality of transistor pairs, and a plurality of source/drain (S/D) local interconnects that are stacked over the substrate and electrically coupled to source regions and drain regions of the plurality of transistor pairs. The semiconductor device further includes one or more conductive planes formed over the substrate. The one or more conductive planes are positioned adjacent to the transistor stack, span a height of the transistor stack and are electrically coupled to the transistor stack.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.