Patent · US Active

Process development visualization tool

US11157661B2 · kind B2 · utility

0Cited by

8References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Vinayak Veer Vats · San Ramon, US
Sidharth Bhatia · Santa Cruz, US
Garrett H. Sin · San Jose, US
Pramod Nambiar · Santa Clara, US
Hang Yu · Woodland, US
Sanjay Kamath · Fremont, US
Deenesh Padhi · Sunnyvale, US
Heng-Cheng Pai · Cupertino, US

Key dates

Filing date	Dec 16, 2019
Grant date	Oct 26, 2021
Priority date	—
Expiry date	Jan 20, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG06F2119/18
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

A process development visualization tool generates a first visualization of a parameter associated with a manufacturing process, and provides a GUI control element associated with a process variable of the manufacturing process, wherein the GUI control element has a first setting associated with a first value for the process variable. The process development tool receives a user input to adjust the GUI control element from the first setting to a second setting, determines a second value for the process variable based on the second setting, and determines a second set of values for the parameter that are associated with the second value for the process variable. The process development tool then generates a second visualization of the parameter, wherein the second visualization represents the second set of values for the parameter that are associated with the second value for the process variable.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.