Garrett H. Sin
17Patents
6h-index
45Co-inventors
62Inventor score
Filing activity: Oct 11, 2008 → Feb 27, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8372210B2 | Post CMP scrubbing of substrates | Electricity | 12 | Active |
| US8774958B2 | Selection of polishing parameters to generate removal profile | Physics | 8 | Active |
| US9213340B2 | Selection of polishing parameters to generate removal or pressure profile | Physics | 7 | Active |
| US7980000B2 | Vapor dryer having hydrophilic end effector | Emerging Cross-Sectional Technologies | 7 | Active |
| US8628376B2 | In-line wafer thickness sensing | Electricity | 7 | Active |
| US10493590B2 | Selection of polishing parameters to generate removal or pressure profile | Physics | 6 | Active |
| US8205352B2 | Vapor dryer having hydrophilic end effector | Emerging Cross-Sectional Technologies | 5 | Active |
| US8202738B2 | Endpoint method using peak location of modified spectra | Electricity | 4 | Active |
| US11853042B2 | Part, sensor, and metrology data integration | Physics | 1 | Active |
| US11592812B2 | Sensor metrology data integration | Emerging Cross-Sectional Technologies | 1 | Active |
| US9873179B2 | Carrier for small pad for chemical mechanical polishing | Performing Operations; Transporting | 0 | Active |
| US12366853B2 | Sensor metrology data integration | Emerging Cross-Sectional Technologies | 0 | Active |
| US10610994B2 | Polishing system with local area rate control and oscillation mode | Electricity | 0 | Active |
| US10434623B2 | Local area polishing system and polishing pad assemblies for a polishing system | Performing Operations; Transporting | 0 | Active |
| US10252397B2 | Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes | Performing Operations; Transporting | 0 | Active |
| US11241769B2 | Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes | Performing Operations; Transporting | 0 | Active |
| US11157661B2 | Process development visualization tool | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.