Inventor · Fremont, CA, US

Sanjay Kamath

18Patents
5h-index
69Co-inventors
65Inventor score

Filing activity: Nov 28, 2006 → Jul 30, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US7967913B2 Remote plasma clean process with cycled high and low pressure clean steps Chemistry; Metallurgy 459 Active
US9362107B2 Flowable low-k dielectric gapfill treatment Electricity 407 Active
US7740706B2 Gas baffle and distributor for semiconductor processing chamber Electricity 13 Active
US7799704B2 Gas baffle and distributor for semiconductor processing chamber Chemistry; Metallurgy 9 Active
US10410869B2 CVD based oxide-metal multi structure for 3D NAND memory devices Electricity 6 Active
US7704897B2 HDP-CVD SiON films for gap-fill Electricity 5 Active
US11217443B2 Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates Electricity 0 Active
US11817320B2 CVD based oxide-metal multi structure for 3D NAND memory devices Electricity 0 Active
US11430654B2 Initiation modulation for plasma deposition Electricity 0 Active
US12094709B2 Plasma treatment process to densify oxide layers Electricity 0 Active
US10950430B2 Pulsed plasma deposition etch step coverage improvement Electricity 0 Active
US11157661B2 Process development visualization tool Physics 0 Active
US12040210B2 Multi-pressure bipolar electrostatic chucking Electricity 0 Active
US11270903B2 Multi zone electrostatic chuck Electricity 0 Active
US11817313B2 Methods for pressure ramped plasma purge Electricity 0 Active
US11776835B2 Power supply signal conditioning for an electrostatic chuck Electricity 0 Active
US11600468B2 Multi channel splitter spool Electricity 0 Active
US11538677B2 Systems and methods for depositing high density and high tensile stress films Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.