Electronic device manufacturing load port apparatus, systems, and methods
US11171029B2 · kind B2 · utility
0Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2019 |
| Grant date | Nov 9, 2021 |
| Priority date | — |
| Expiry date | Oct 16, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A carrier door opener includes one or more connector devices configured to interface with a door of a substrate carrier located at a load port. The carrier door opener further includes an outer surface forming a groove and a load port seal seated in the groove. The load port seal is configured to seal against a first portion of a planar surface of a panel of the load port around a panel opening formed by the panel. A second portion of the planar surface of the panel is configured to seal to a factory interface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.