Patent · US Active

Side storage pods, equipment front end modules, and methods for operating EFEMs

US11189511B2 · kind B2 · utility

4Cited by

10References

21Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Paul B. Reuter · Austin, US
Dean C. Hruzek · Cedar Park, US
Nir Merry · Mountain View, US
John C. Menk · Round Rock, US
Douglas B. Baumgarten · Round Rock, US

Key dates

Filing date	Oct 17, 2019
Grant date	Nov 30, 2021
Priority date	—
Expiry date	Oct 19, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67778
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Electronic device processing systems including an equipment front end module with at least one side storage pod are described. The side storage pod has a side storage container and a container plenum. A fan draws purge gas from the equipment front end module chamber into the container plenum where the purge gas is directed into the side storage container to pass over substrates stored therein and is then exhausted back into the equipment front end module chamber. Methods and systems are also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.