Chemical delivery system and method of operating the chemical delivery system

US11421320B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• David James Eldridge · Seward Junction, US
• David Walter Peters · Kingsland, US
• Robert Wright, Jr. · Newtown, US
• Bryan C. Hendrix · Danbury, US
• Scott L. Battle · Cedar Park, US
• John N. Gregg · Marble Falls, US

Key dates

• Filing date: Dec 5, 2018
• Grant date: Aug 23, 2022
• Expiry date: May 20, 2041

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/52
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A chemical delivery system includes a bulk container, a run/refill chamber, a first conduit and a second conduit. The bulk container stores a precursor. The run/refill chamber includes a plurality of spaced tubes having a plurality of surfaces for receiving the precursor in vapor form and storing the precursor in solid form. The first conduit connects the bulk container to the run/refill chamber for transporting the precursor from the bulk container to the run/refill chamber in vapor form. The second conduit connects the run/refill chamber to a deposition chamber for transporting the precursor from the run/refill chamber to the deposition chamber in vapor form.