Sensor metrology data integration

US11592812B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Sidharth Bhatia · Santa Cruz, US
• Garrett H. Sin · San Jose, US
• Heng-Cheng Pai · Cupertino, US
• Pramod Nambiar · Santa Clara, US
• Ganesh Balasubramanian · Sunnyvale, US
• Irfan Jamil · San Jose, US

Key dates

• Filing date: Feb 14, 2020
• Grant date: Feb 28, 2023
• Expiry date: Dec 11, 2040

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/02
• WIPO field: Control
• WIPO sector: Instruments

Abstract

Methods, systems, and non-transitory computer readable medium are described for sensor metrology data integration. A method includes receiving sets of sensor data and sets of metrology data. Each set of sensor data includes corresponding sensor values associated with producing corresponding product by manufacturing equipment and a corresponding sensor data identifier. Each set of metrology data includes corresponding metrology values associated with the corresponding product manufactured by the manufacturing equipment and a corresponding metrology data identifier. The method further includes determining common portions between each corresponding sensor data identifier and each corresponding metrology data identifier. The method further includes, for each of the sensor-metrology matches, generating a corresponding set of aggregated sensor-metrology data and storing the sets of aggregated sensor-metrology data to train a machine learning model. The trained machine learning model is capable of generating one or more outputs for performing a corrective action associated with the manufacturing equipment.