Patent · US Active

Side storage pods, equipment front end modules, and methods for operating the same

US11610794B2 · kind B2 · utility

0Cited by

6References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Paul B. Reuter · Austin, US
Dean C. Hruzek · Cedar Park, US
Nir Merry · Mountain View, US
John C. Menk · Round Rock, US
Douglas B. Baumgarten · Round Rock, US

Key dates

Filing date	Oct 17, 2019
Grant date	Mar 21, 2023
Priority date	—
Expiry date	Apr 16, 2041

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB01D2259/4525
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

Electronic device processing assemblies including an equipment front end module (EFEM) with at least one side storage pod attached thereto are described. The side storage pod has a side storage container. In some embodiments, an exhaust conduit extends between the chamber and a pod plenum that can contain a chemical filter proximate thereto. A supplemental fan may draw purge gas from the pod plenum through the chemical filter and route the gas through a return duct to an upper plenum of the EFEM. Methods and side storage pods in accordance with these and other embodiments are also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.