Side storage pods, equipment front end modules, and methods for operating EFEMs

US11640915B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Paul B. Reuter · Austin, US
• Dean C. Hruzek · Cedar Park, US
• Nir Merry · Mountain View, US
• John C. Menk · Round Rock, US
• Douglas B. Baumgarten · Round Rock, US

Key dates

• Filing date: Nov 22, 2021
• Grant date: May 2, 2023
• Expiry date: Nov 22, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67778
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Electronic device processing systems including an equipment front end module (EFEM) with a side storage pod are described. The EFEM includes an EFEM chamber and a recirculation duct. The side storage pod is fluidly coupled to the recirculation duct. The side storage pod includes an interior chamber and a side storage container disposed within the interior chamber. The side storage container is configured to receive one or more substrates from the EFEM chamber. The electronic device processing system further includes an environmental control system. The environmental control system is configured to circulate a purge gas between the EFEM chamber and the side storage pod via the recirculation duct.