Adjustable achromatic collimator assembly for endpoint detection systems
US11719952B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 11, 2020 |
| Grant date | Aug 8, 2023 |
| Priority date | — |
| Expiry date | Oct 8, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/005
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Implementations disclosed describe a collimator assembly having a collimator housing that includes an interface configured to optically couple to a process chamber that has a target surface, and a port to receive an optical fiber to deliver, to an enclosure formed by the collimator housing, a first (second) plurality of spectral components of light belonging to a first (second) range of wavelengths, and an achromatic lens located, at least partially, within the enclosure formed by the collimator housing, the achromatic lens to direct the first (second) plurality of spectral components of light onto the target surface to illuminate a first (second) region on the target surface, wherein the second region is substantially the same as the first region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.