Plasma erosion resistant thin film coating for high temperature application
US11773479B2 · kind B2 · utility
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31References
15Claims
0Family size
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Key dates
| Filing date | Sep 30, 2020 |
| Grant date | Oct 3, 2023 |
| Priority date | — |
| Expiry date | Aug 30, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An article such as a susceptor includes a body of a thermally conductive material coated by a first protective layer and a second protective layer over a surface of the body. The first protective layer is a thermally conductive ceramic. The second protective layer covers the first protective layer and is a plasma resistant ceramic thin film that is resistant to cracking at temperatures of 650 degrees Celsius.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.