Patent · US Active

Apparatus and method for determining a condition associated with a pellicle

US11906907B2 · kind B2 · utility

0Cited by

2References

20Claims

0Family size

Assignees

ASML NETHERLANDS B.V. · NL
ASML Holding N.V. · NL

Inventors

Derk Servatius Gertruda Brouns · Herentals, BE
Joshua Adams · Manchester, US
Aage Bendiksen · Fairfield, US
Richard David Jacobs · Brookfield, US
Andrew Judge · Monroe, US
Veera Venkata Narasimha Narendra Phani KOTTAPALLI · Fairfield, US
Joseph H. Lyons · Wilton, US
Theodorus Marinus Modderman · Nuenen, NL
Manish Ranjan · Sherwood, US
Marcus Adrianus Van De Kerkhof · Helmond, NL
Xugang Xiong · Boston, US

Key dates

Filing date	Nov 27, 2018
Grant date	Feb 20, 2024
Priority date	—
Expiry date	Nov 27, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70983
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.