Patent · US Active

Corrosion resistant film on a chamber component and methods of depositing thereof

US11932938B2 · kind B2 · utility

0Cited by

1References

12Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Lisa J. Enman · Sunnyvale, US
Steven Marcus · Tempe, US
Mark Saly · Santa Clara, US
Lei Zhou · Tianjin, CN

Key dates

Filing date	Jul 22, 2020
Grant date	Mar 19, 2024
Priority date	—
Expiry date	Jul 25, 2041

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/45565
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Disclosed is a coated chamber component comprising a body having a reduced metal surface such that the reduced metal surface has less metal oxide as compared to an amount of metal oxide on a metal surface that has not been reduced. The metal surface may be reduced by pulsing a reducing alcohol thereon. The reduced metal surface may be coated with a corrosion resistant film that may be deposited onto the reduced metal surface by a dry atomic layer deposition process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.