Lisa J. Enman
8Patents
1h-index
25Co-inventors
40Inventor score
Filing activity: Mar 6, 2020 → Sep 14, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11398388B2 | Methods for selective dry etching gallium oxide | Electricity | 1 | Active |
| US11932940B2 | Silyl pseudohalides for silicon containing films | Electricity | 0 | Active |
| US11932938B2 | Corrosion resistant film on a chamber component and methods of depositing thereof | Chemistry; Metallurgy | 0 | Active |
| US12261049B2 | Selective etch of a substrate | Electricity | 0 | Active |
| US11732356B2 | Multilayer encapsulation stacks by atomic layer deposition | Electricity | 0 | Active |
| US12305275B2 | Corrosion resistant film on a chamber component and methods of depositing thereof | Chemistry; Metallurgy | 0 | Active |
| US11581206B2 | Capacitive sensor for chamber condition monitoring | Physics | 0 | Active |
| US11942330B2 | Methods for selective dry etching gallium oxide | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.