Inventor · Tempe, AZ, US

Steven Marcus

30Patents
8h-index
67Co-inventors
78Inventor score

Filing activity: Jan 29, 1998 → Sep 14, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US8383525B2 Plasma-enhanced deposition process for forming a metal oxide thin film and related structures Electricity 70 Active
US8334218B2 Method of forming non-conformal layers Electricity 54 Active
US7608549B2 Method of forming non-conformal layers Electricity 32 Active
US6303520A Silicon oxynitride film Electricity 15 Expired
US7595270B2 Passivated stoichiometric metal nitride films Electricity 13 Active
US8268409B2 Plasma-enhanced deposition of metal carbide films Chemistry; Metallurgy 11 Active
US6077751A Method of rapid thermal processing (RTP) of ion implanted silicon Electricity 10 Expired
US7666474B2 Plasma-enhanced pulsed deposition of metal carbide films Electricity 9 Active
US10470625B2 Vacuum cleaner and filter for a vacuum cleaner Performing Operations; Transporting 6 Active
US9631272B2 Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds Electricity 2 Active
US8557702B2 Plasma-enhanced atomic layers deposition of conductive material over dielectric layers Electricity 2 Active
US10531772B2 Handheld vacuum cleaner Performing Operations; Transporting 2 Active
US10743731B2 Vacuum filter Performing Operations; Transporting 2 Active
US10570511B2 Gas separation control in spatial atomic layer deposition Chemistry; Metallurgy 1 Active
US11230763B2 Gas separation control in spatial atomic layer deposition Chemistry; Metallurgy 1 Active
US11164753B2 Self-aligned double patterning with spatial atomic layer deposition Electricity 1 Active
US11058273B2 Vacuum cleaner Performing Operations; Transporting 1 Active
US11612292B2 Vacuum cleaner Performing Operations; Transporting 0 Active
US12074010B2 Atomic layer deposition part coating chamber Chemistry; Metallurgy 0 Active
US12431361B2 Self-aligned double patterning with spatial atomic layer deposition Electricity 0 Active
US11932938B2 Corrosion resistant film on a chamber component and methods of depositing thereof Chemistry; Metallurgy 0 Active
US12305275B2 Corrosion resistant film on a chamber component and methods of depositing thereof Chemistry; Metallurgy 0 Active
US11607637B2 Power tool including an air filter and debris collector Performing Operations; Transporting 0 Active
US11658014B2 Apparatuses and methods of protecting nickel and nickel containing components with thin films Electricity 0 Active
US11946140B2 Hot showerhead Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.