Gas distribution ceramic heater for deposition chamber

US12016092B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Pingyan Lei · San Jose, US
• Dien-Yeh Wu · San Jose, US
• Jallepally Ravi · Santa Clara, US
• Manjunatha Koppa · Kanchinakote, IN
• Ambarish Toorihal · Kanchinakote, IN
• Sandesh Yadamane · Kanchinakote, IN
• Vinod Konda Purathe · Bengaluru, IN
• Xiaoxiong Yuan · Cupertino, US

Key dates

• Filing date: Nov 30, 2020
• Grant date: Jun 18, 2024
• Expiry date: Jan 19, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05B6/62
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Embodiments of a lid heater for a deposition chamber are provided herein. In some embodiments, a lid heater for a deposition chamber includes a ceramic heater body having a first side opposite a second side, wherein the ceramic heater body includes a first plurality of gas channels extending from one or more first gas inlets on the first side, wherein each of the one or more first gas inlets extend to a plurality of first gas outlets on the second side; a heating element embedded in the ceramic heater body; and an RF electrode embedded in the ceramic heater body proximate the second side, wherein the first plurality of gas channels extend through the RF electrode.