Pingyan Lei
10Patents
2h-index
32Co-inventors
46Inventor score
Filing activity: Jun 16, 2016 → Mar 8, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9881787B2 | Deposition methods for uniform and conformal hybrid titanium oxide films | Electricity | 2 | Active |
| US11555244B2 | High temperature dual chamber showerhead | Chemistry; Metallurgy | 2 | Active |
| US12016092B2 | Gas distribution ceramic heater for deposition chamber | Electricity | 0 | Active |
| US12406849B2 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | Electricity | 0 | Active |
| US11421322B2 | Blocker plate for use in a substrate process chamber | Electricity | 0 | Active |
| US11955319B2 | Processing chamber with multiple plasma units | Electricity | 0 | Active |
| US10508339B2 | Blocker plate for use in a substrate process chamber | Electricity | 0 | Active |
| US11430661B2 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | Electricity | 0 | Active |
| US12230479B2 | Processing chamber with multiple plasma units | Electricity | 0 | Active |
| US11658014B2 | Apparatuses and methods of protecting nickel and nickel containing components with thin films | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.