Preclean chamber upper shield with showerhead
US12080522B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 22, 2020 |
| Grant date | Sep 3, 2024 |
| Priority date | — |
| Expiry date | Oct 12, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32651
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Embodiments of process kits for use in a process chamber are provided herein. In some embodiments, a process kit for use in a process chamber, includes: a top plate having a central recess disposed in an upper surface thereof; a channel extending from an outer portion of the top plate to the central recess; a plurality of holes disposed through the top plate from a bottom surface of the recess to a lower surface of the top plate; a cover plate configured to be coupled to the top plate and to form a seal along a periphery of the central recess such that the covered recess forms a plenum within the top plate; and a tubular body extending down from the lower surface of the top plate and surrounding the plurality of holes, the tubular body further configured to surround a substrate support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.