Factory interface robots usable with integrated load locks

US12142508B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Sushant S. Koshti · Sunnyvale, US
• Paul B. Reuter · Austin, US
• David Phillips · Coppell, US
• Jacob Newman · Palo Alto, US
• Andrew J. Constant · Cupertino, US
• Michael R. Rice · Pleasanton, US
• Shay Assaf · Santa Clara, US
• Srinivas Poshatrahalli Gopalakrishna · Kanchinakote, IN
• Devendra Channappa Holeyannavar · Bengaluru, IN
• Douglas B. Baumgarten · Round Rock, US
• Arunkumar Ramachandraiah · Savanuru, IN
• Narayanan Ramachandran · Bolingbrook, US

Key dates

• Filing date: Oct 12, 2021
• Grant date: Nov 12, 2024
• Expiry date: Oct 25, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68707
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer substrates between a first set of substrate carriers and the first load lock. The factory interface robot can comprise a vertical tower, a plurality of links, and an end effector.