Patent · US Active

Wiring in diffusion breaks in an integrated circuit

US12218135B2 · kind B2 · utility

0Cited by
0References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 13, 2022
Grant dateFeb 4, 2025
Priority date
Expiry dateFeb 10, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D30/6219
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A semiconductor device includes a first three dimensional (3D) transistor and a second 3D transistor oriented parallel to the first 3D transistor disposed in a substrate, the first 3D transistor and the second 3D transistor being a subset of a plurality of transistors. The device includes a diffusion-break trench disposed in a region laterally separating the second 3D transistor from the first 3D transistor, the diffusion-break trench having a length extending along a lateral direction. The device includes a diffusion-break wire filling the diffusion-break trench, the diffusion-break wire having a height along a vertical direction, gates of the plurality of transistors being made of a different conductive material than the diffusion-break wire.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.