Patent · US Active

Stacked transistors with different channel widths

US12230544B2 · kind B2 · utility

0Cited by
21References
19Claims
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Key dates

Filing dateNov 2, 2022
Grant dateFeb 18, 2025
Priority date
Expiry dateNov 2, 2042

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/834
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a first stack of nanowires above a substrate with a first gate structure over, around, and between the first stack of nanowires and a second stack of nanowires above the substrate with a second gate structure over, around, and between the second stack of nanowires. The device also includes a first source/drain region contacting a first number of nanowires of the first nanowire stack and a second source/drain region contacting a second number of nanowires of the second nanowire stack such that the first number and second number of contacted nanowires are different.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.