Patent · US Active

Compositions for tungsten etching inhibition

US12378439B2 · kind B2 · utility

0Cited by

6References

12Claims

0Family size

Assignee

BASF SE

Inventors

Michael Lauter · Mannheim, DE
Haci Osman GUEVENC · Heidelberg, DE
Wei-Lan Chiu
Te Yu Wei · Taoyuan, TW

Key dates

Filing date	Aug 4, 2020
Grant date	Aug 5, 2025
Priority date	—
Expiry date	Oct 1, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/3212
WIPO fieldBasic materials chemistry
WIPO sectorChemistry

Abstract

The presently claimed invention relates to compositions and methods for inhibition of etching. The presently claimed invention particularly relates to a composition and methods for inhibition of tungsten etching.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.