Semiconductor processing system with robotic autoloader and load lock
US5224809A · kind A · utility
36Cited by
11References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 30, 1991 |
| Grant date | Jul 6, 1993 |
| Priority date | — |
| Expiry date | Dec 30, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/13
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.