Semiconductor processing system with robotic autoloader and load lock
US5280983A · kind A · utility
80Cited by
19References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 19, 1992 |
| Grant date | Jan 25, 1994 |
| Priority date | — |
| Expiry date | Oct 19, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S294/902
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.