Piezoresistive cantilever with integral tip for scanning probe microscope
US5444244A · kind A · utility
62Cited by
7References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 1993 |
| Grant date | Aug 22, 1995 |
| Priority date | — |
| Expiry date | Jun 3, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever for a scanning probe microscope is disclosed. The cantilever includes a piezoresistor for detecting the deflection of the cantilever, and a tip which is formed integrally with the cantilever. A process of fabricating such a cantilever is also disclosed, the process yielding a tip which has a high aspect ratio and a small radius of curvature at its apex. A combined atomic force/lateral force microscope including two or more piezoresistors responsive to both the bending and torsion of the cantilever is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.