Method for manufacturing micro-mechanical components using selective anodization of silicon

US5542558A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Gerhard Benz · Eppelheim, DE
• Jiri Marek · Reutlingen, DE
• Martin Willmann · Reutlingen, DE
• Frank Bantien · Ditzingen, DE
• Horst Muenzel · Reutlingen, DE
• Franz Laermer · Stuttgart, DE
• Michael Offenberg · Lörrach, DE
• Andrea Schilp · Schwäbisch Gmünd, DE

Key dates

• Filing date: Sep 19, 1994
• Grant date: Aug 6, 1996
• Expiry date: Sep 19, 2014

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S438/96
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for manufacturing micro-mechanical components in which a structure is produced on a silicon layer, which is to be undercut in a further step. The silicon is selectively anodized for this undercutting operation. Thus, the method enables the manufacturing of micro-mechanical components that can be integrated together with bipolar circuit elements.