Patent · US Expired

Puncture resistant electrostatic chuck

US5986875A · kind A · utility

20Cited by

34References

32Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Arik Donde · Dallas, US
Hyman J. Levinstein · Berkeley Heights, US
Robert Wu · Pleasanton, US
Andreas Hegedus · Burlingame, US
Edwin C. Weldon · Los Gatos, US
Shamouil Shamouilian · San Jose, US
Jon Clinton · San Jose, US
Surinder Bedi · Fremont, US

Key dates

Filing date	Jan 29, 1998
Grant date	Nov 16, 1999
Priority date	—
Expiry date	Jan 29, 2018

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T279/23
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A puncture resistant electrostatic chuck (20) is described. The chuck (20) comprises at least one electrode (25); and a composite insulator (30) covering the electrode. The composite insulator comprises a matrix material having a conformal holding surface (50) capable of conforming to the substrate (35) under application of an electrostatic force generated by the electrode to reduce leakage of heat transfer fluid held between the substrate and the holding surface. A hard puncture resistant layer, such a layer of fibers or an aromatic polyamide layer, is positioned below the holding surface (50) and is sufficiently hard to increase the puncture resistance of the composite insulator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.